SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

A substrate processing apparatus provided with a processing part for performing a periphery process, and an inspection part for inspecting the periphery of a substrate can prevent a decrease in the throughput resulting from substrate transfer. A substrate processing apparatus according to the presen...

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Bibliographische Detailangaben

1. Verfasser:	TSUJIHASHI TATSUHIKO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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