COOLING DEVICE SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD

The present invention provides a cooling apparatus that has a simple configuration, thereby having the advantage to stably control a system. The cooling apparatus according to the present invention comprises: a circulation system configured to circulate a refrigerant in the condenser so as to allow...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	NOMOTO MAKOTO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS BLASTING CINEMATOGRAPHY COMBINED HEATING AND REFRIGERATION SYSTEMS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HEAT PUMP SYSTEMS HEATING HOLOGRAPHY LIGHTING LIQUEFACTION SOLIDIFICATION OF GASES MANUFACTURE OR STORAGE OF ICE MATERIALS THEREFOR MECHANICAL ENGINEERING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS REFRIGERATION MACHINES, PLANTS OR SYSTEMS REFRIGERATION OR COOLING SEMICONDUCTOR DEVICES WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The present invention provides a cooling apparatus that has a simple configuration, thereby having the advantage to stably control a system. The cooling apparatus according to the present invention comprises: a circulation system configured to circulate a refrigerant in the condenser so as to allow the refrigerant to pass through a pump, a heater, a throttle valve and a carburetor and to return to the condenser; and a cooling system including a heat exchanger disposed in the condenser. The condenser has a first portion in which the refrigerant is in a liquid state and a second portion in which the refrigerant is in a gaseous state, wherein at least a part of the heat exchanger is disposed in the second portion. 냉각장치는, 응축기 내의 냉매를 펌프, 가열기, 스로틀 밸브 및 기화기를 거쳐 상기 응축기로 되돌리도록 상기 냉매를 순환시키도록 구성된 순환계와, 상기 응축기 내에 배치된 열 교환기를 포함하는 냉각계를 구비한다. 상기 응축기는, 상기 냉매가 액체 상태에서 존재하는 제1 부분과, 상기 냉매가 기체 상태에서 존재하는 제2 부분을 갖고, 상기 열 교환기의 적어도 일부는 상기 제2 부분에 배치되어 있다.