챔버 컴포넌트 청정도 측정 시스템

컴포넌트의 표면 상의 오염물들을 측정하는 장치가 제공된다. 측정 유체를 홀딩하기 위한 추출 용기는 측정 유체를 사용하여 메니스커스를 형성하도록 구성된 개구부를 갖는다. 액츄에이터는 추출 용기 및 컴포넌트 중 적어도 하나를 메니스커스가 컴포넌트의 표면과 콘택팅하는 위치로 이동시킨다. 트랜스듀서는 측정 유체에 음향 에너지를 제공하도록 위치된다. An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for ho...

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Hauptverfasser: YASSERI AMIR A, BAYLON KENNET CRESENCIO, OUTKA DUANE, AVOYAN ARMEN, HUNDI GIRISH M, LA CROIX CLIFF, DAUGHERTY JOHN
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container_issue
container_start_page
container_title
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creator YASSERI AMIR A
BAYLON KENNET CRESENCIO
OUTKA DUANE
AVOYAN ARMEN
HUNDI GIRISH M
LA CROIX CLIFF
DAUGHERTY JOHN
description 컴포넌트의 표면 상의 오염물들을 측정하는 장치가 제공된다. 측정 유체를 홀딩하기 위한 추출 용기는 측정 유체를 사용하여 메니스커스를 형성하도록 구성된 개구부를 갖는다. 액츄에이터는 추출 용기 및 컴포넌트 중 적어도 하나를 메니스커스가 컴포넌트의 표면과 콘택팅하는 위치로 이동시킨다. 트랜스듀서는 측정 유체에 음향 에너지를 제공하도록 위치된다. An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. A transducer is positioned to provide acoustic energy to the measurement fluid.
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An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. 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An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. A transducer is positioned to provide acoustic energy to the measurement fluid.</abstract><oa>free_for_read</oa></addata></record>
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title 챔버 컴포넌트 청정도 측정 시스템
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