챔버 컴포넌트 청정도 측정 시스템
컴포넌트의 표면 상의 오염물들을 측정하는 장치가 제공된다. 측정 유체를 홀딩하기 위한 추출 용기는 측정 유체를 사용하여 메니스커스를 형성하도록 구성된 개구부를 갖는다. 액츄에이터는 추출 용기 및 컴포넌트 중 적어도 하나를 메니스커스가 컴포넌트의 표면과 콘택팅하는 위치로 이동시킨다. 트랜스듀서는 측정 유체에 음향 에너지를 제공하도록 위치된다. An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for ho...
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creator | YASSERI AMIR A BAYLON KENNET CRESENCIO OUTKA DUANE AVOYAN ARMEN HUNDI GIRISH M LA CROIX CLIFF DAUGHERTY JOHN |
description | 컴포넌트의 표면 상의 오염물들을 측정하는 장치가 제공된다. 측정 유체를 홀딩하기 위한 추출 용기는 측정 유체를 사용하여 메니스커스를 형성하도록 구성된 개구부를 갖는다. 액츄에이터는 추출 용기 및 컴포넌트 중 적어도 하나를 메니스커스가 컴포넌트의 표면과 콘택팅하는 위치로 이동시킨다. 트랜스듀서는 측정 유체에 음향 에너지를 제공하도록 위치된다.
An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. A transducer is positioned to provide acoustic energy to the measurement fluid. |
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fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_KR20220000409A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>KR20220000409A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_KR20220000409A3</originalsourceid><addsrcrecordid>eNrjZNB7s3HK600tCm92b3nbv-Z1S8_brh0KbzatfbNg6ut-oPCOhUCWwpvuOW-6lrxtncPDwJqWmFOcyguluRmU3VxDnD10Uwvy41OLCxKTU_NSS-K9g4wMjIwMgMDEwNLRmDhVAJNMOGE</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>챔버 컴포넌트 청정도 측정 시스템</title><source>esp@cenet</source><creator>YASSERI AMIR A ; BAYLON KENNET CRESENCIO ; OUTKA DUANE ; AVOYAN ARMEN ; HUNDI GIRISH M ; LA CROIX CLIFF ; DAUGHERTY JOHN</creator><creatorcontrib>YASSERI AMIR A ; BAYLON KENNET CRESENCIO ; OUTKA DUANE ; AVOYAN ARMEN ; HUNDI GIRISH M ; LA CROIX CLIFF ; DAUGHERTY JOHN</creatorcontrib><description>컴포넌트의 표면 상의 오염물들을 측정하는 장치가 제공된다. 측정 유체를 홀딩하기 위한 추출 용기는 측정 유체를 사용하여 메니스커스를 형성하도록 구성된 개구부를 갖는다. 액츄에이터는 추출 용기 및 컴포넌트 중 적어도 하나를 메니스커스가 컴포넌트의 표면과 콘택팅하는 위치로 이동시킨다. 트랜스듀서는 측정 유체에 음향 에너지를 제공하도록 위치된다.
An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. A transducer is positioned to provide acoustic energy to the measurement fluid.</description><language>kor</language><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220103&DB=EPODOC&CC=KR&NR=20220000409A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220103&DB=EPODOC&CC=KR&NR=20220000409A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YASSERI AMIR A</creatorcontrib><creatorcontrib>BAYLON KENNET CRESENCIO</creatorcontrib><creatorcontrib>OUTKA DUANE</creatorcontrib><creatorcontrib>AVOYAN ARMEN</creatorcontrib><creatorcontrib>HUNDI GIRISH M</creatorcontrib><creatorcontrib>LA CROIX CLIFF</creatorcontrib><creatorcontrib>DAUGHERTY JOHN</creatorcontrib><title>챔버 컴포넌트 청정도 측정 시스템</title><description>컴포넌트의 표면 상의 오염물들을 측정하는 장치가 제공된다. 측정 유체를 홀딩하기 위한 추출 용기는 측정 유체를 사용하여 메니스커스를 형성하도록 구성된 개구부를 갖는다. 액츄에이터는 추출 용기 및 컴포넌트 중 적어도 하나를 메니스커스가 컴포넌트의 표면과 콘택팅하는 위치로 이동시킨다. 트랜스듀서는 측정 유체에 음향 에너지를 제공하도록 위치된다.
An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. A transducer is positioned to provide acoustic energy to the measurement fluid.</description><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNB7s3HK600tCm92b3nbv-Z1S8_brh0KbzatfbNg6ut-oPCOhUCWwpvuOW-6lrxtncPDwJqWmFOcyguluRmU3VxDnD10Uwvy41OLCxKTU_NSS-K9g4wMjIwMgMDEwNLRmDhVAJNMOGE</recordid><startdate>20220103</startdate><enddate>20220103</enddate><creator>YASSERI AMIR A</creator><creator>BAYLON KENNET CRESENCIO</creator><creator>OUTKA DUANE</creator><creator>AVOYAN ARMEN</creator><creator>HUNDI GIRISH M</creator><creator>LA CROIX CLIFF</creator><creator>DAUGHERTY JOHN</creator><scope>EVB</scope></search><sort><creationdate>20220103</creationdate><title>챔버 컴포넌트 청정도 측정 시스템</title><author>YASSERI AMIR A ; BAYLON KENNET CRESENCIO ; OUTKA DUANE ; AVOYAN ARMEN ; HUNDI GIRISH M ; LA CROIX CLIFF ; DAUGHERTY JOHN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20220000409A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>kor</language><creationdate>2022</creationdate><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>YASSERI AMIR A</creatorcontrib><creatorcontrib>BAYLON KENNET CRESENCIO</creatorcontrib><creatorcontrib>OUTKA DUANE</creatorcontrib><creatorcontrib>AVOYAN ARMEN</creatorcontrib><creatorcontrib>HUNDI GIRISH M</creatorcontrib><creatorcontrib>LA CROIX CLIFF</creatorcontrib><creatorcontrib>DAUGHERTY JOHN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>YASSERI AMIR A</au><au>BAYLON KENNET CRESENCIO</au><au>OUTKA DUANE</au><au>AVOYAN ARMEN</au><au>HUNDI GIRISH M</au><au>LA CROIX CLIFF</au><au>DAUGHERTY JOHN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>챔버 컴포넌트 청정도 측정 시스템</title><date>2022-01-03</date><risdate>2022</risdate><abstract>컴포넌트의 표면 상의 오염물들을 측정하는 장치가 제공된다. 측정 유체를 홀딩하기 위한 추출 용기는 측정 유체를 사용하여 메니스커스를 형성하도록 구성된 개구부를 갖는다. 액츄에이터는 추출 용기 및 컴포넌트 중 적어도 하나를 메니스커스가 컴포넌트의 표면과 콘택팅하는 위치로 이동시킨다. 트랜스듀서는 측정 유체에 음향 에너지를 제공하도록 위치된다.
An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. A transducer is positioned to provide acoustic energy to the measurement fluid.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
title | 챔버 컴포넌트 청정도 측정 시스템 |
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