INFORMATION PROCESSING APPARATUS AND MONITORING METHOD

The present disclosure provides a technique for detecting an abnormality in a semiconductor manufacturing device. An information processing device for detecting an abnormality in the semiconductor manufacturing device comprises: a sensor data acquisition unit which acquires sensor waveform data with...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TERASAWA NOBUTOSHI, SARUWATARI SHINTARO, SHOJI KAZUSHI, MIYAZAKI MOTOKATSU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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