2 Upstream two-stage direct-and- indirect electrospray unit

The present invention relates to an upstream two-stage direct and indirect electrostatic spraying device which removes dust contained in difficult-to-decomposable process gases (PFCs based gases such as CF_4, C_2F_6, C_2F_4, SF_6 and NF_3) used and then discharged in a semiconductor and display manu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM JOENG GEUN, LEE KYE JUNG, KIM JIN HAN, CHOI JONG WON, PARK JUN SU, CHO MIN JEONG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLIDMATERIALS OR FLUIDS MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROMSOLID MATERIALS OR FLUIDS PERFORMING OPERATIONS SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATICTABLES OR JIGS TRANSPORTING
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