METHOD AND APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE

A method and apparatus for manufacturing a semiconductor device are disclosed. The disclosed method of manufacturing the semiconductor device may include the steps of: forming a second conductivity type impurity region on the surface side of a first conductivity type substrate; forming a conductive...

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Bibliographische Detailangaben
1. Verfasser: CHO, CHOONG RAE
Format: Patent
Sprache:eng ; kor
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