COATING APPARATUS COATING METHOD AND MANAGEMENT SYSTEM OF COATING HEAD
The present invention provides a coating apparatus, a coating method, and a coating head management system. According to the present invention, the state of a coating head is appropriately managed. The coating apparatus (11) comprises: a holding table (21) for holding a substrate (70); a coating uni...
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| creator | OHDAIRA NAOKI SHIRAISHI TAKASHI KAWASUMI YUKIHIRO MURAI TOSHINOBU |
| description | The present invention provides a coating apparatus, a coating method, and a coating head management system. According to the present invention, the state of a coating head is appropriately managed. The coating apparatus (11) comprises: a holding table (21) for holding a substrate (70); a coating unit (coating head unit (22)) that coats a coating material on the substrate held by the holding table; and a control unit (50) that performs control such that the coating material is applied to a predetermined region of the substrate by moving the substrate and the coating unit relative to each other. The coating head (31) for coating a coating material on the substrate is detachably mounted on the coating part. The coating head has a storage unit (33) including a first storage area in which unique information of the coating head is stored, and a second storage area in which history information of the coating head is stored. The control unit reads the unique information from the first storage area, and stores the unique information in the second storage area according to the coating operation of the coating head.
[과제] 도포 헤드의 상태를 적합하게 관리한다. [해결 수단] 도포 장치(11)는, 기판(70)을 보지하는 보지 테이블(21)과, 보지 테이블에 보지되어 있는 기판에 도포재를 도포하는 도포부(도포 헤드 유닛(22))와, 기판과 도포부를 상대적으로 이동하는 것에 의해 기판의 소정 영역에 도포재를 도포하도록 제어하는 제어부(50)를 구비하고 있다. 도포부에는, 기판에 도포재를 도포하기 위한 도포 헤드(31)가 착탈 자유롭게 장착되어 있다. 도포 헤드는, 도포 헤드의 고유 정보가 기억되는 제 1 기억 영역과, 도포 헤드의 내력 정보가 기억되는 제 2 기억 영역을 포함하는 기억부(33)를 가지고 있다. 제어부는, 제 1 기억 영역으로부터 고유 정보를 판독함과 함께, 도포 헤드의 도포 동작에 따라 내력 정보를 제 2 기억 영역에 저장한다. |
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[과제] 도포 헤드의 상태를 적합하게 관리한다. [해결 수단] 도포 장치(11)는, 기판(70)을 보지하는 보지 테이블(21)과, 보지 테이블에 보지되어 있는 기판에 도포재를 도포하는 도포부(도포 헤드 유닛(22))와, 기판과 도포부를 상대적으로 이동하는 것에 의해 기판의 소정 영역에 도포재를 도포하도록 제어하는 제어부(50)를 구비하고 있다. 도포부에는, 기판에 도포재를 도포하기 위한 도포 헤드(31)가 착탈 자유롭게 장착되어 있다. 도포 헤드는, 도포 헤드의 고유 정보가 기억되는 제 1 기억 영역과, 도포 헤드의 내력 정보가 기억되는 제 2 기억 영역을 포함하는 기억부(33)를 가지고 있다. 제어부는, 제 1 기억 영역으로부터 고유 정보를 판독함과 함께, 도포 헤드의 도포 동작에 따라 내력 정보를 제 2 기억 영역에 저장한다.</description><language>eng ; kor</language><subject>APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL ; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ; CONTROL OR REGULATING SYSTEMS IN GENERAL ; CONTROLLING ; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS ; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ; PERFORMING OPERATIONS ; PHYSICS ; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL ; REGULATING ; SPRAYING OR ATOMISING IN GENERAL ; TRANSPORTING</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210719&DB=EPODOC&CC=KR&NR=20210090106A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76516</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210719&DB=EPODOC&CC=KR&NR=20210090106A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>OHDAIRA NAOKI</creatorcontrib><creatorcontrib>SHIRAISHI TAKASHI</creatorcontrib><creatorcontrib>KAWASUMI YUKIHIRO</creatorcontrib><creatorcontrib>MURAI TOSHINOBU</creatorcontrib><title>COATING APPARATUS COATING METHOD AND MANAGEMENT SYSTEM OF COATING HEAD</title><description>The present invention provides a coating apparatus, a coating method, and a coating head management system. According to the present invention, the state of a coating head is appropriately managed. The coating apparatus (11) comprises: a holding table (21) for holding a substrate (70); a coating unit (coating head unit (22)) that coats a coating material on the substrate held by the holding table; and a control unit (50) that performs control such that the coating material is applied to a predetermined region of the substrate by moving the substrate and the coating unit relative to each other. The coating head (31) for coating a coating material on the substrate is detachably mounted on the coating part. The coating head has a storage unit (33) including a first storage area in which unique information of the coating head is stored, and a second storage area in which history information of the coating head is stored. The control unit reads the unique information from the first storage area, and stores the unique information in the second storage area according to the coating operation of the coating head.
[과제] 도포 헤드의 상태를 적합하게 관리한다. [해결 수단] 도포 장치(11)는, 기판(70)을 보지하는 보지 테이블(21)과, 보지 테이블에 보지되어 있는 기판에 도포재를 도포하는 도포부(도포 헤드 유닛(22))와, 기판과 도포부를 상대적으로 이동하는 것에 의해 기판의 소정 영역에 도포재를 도포하도록 제어하는 제어부(50)를 구비하고 있다. 도포부에는, 기판에 도포재를 도포하기 위한 도포 헤드(31)가 착탈 자유롭게 장착되어 있다. 도포 헤드는, 도포 헤드의 고유 정보가 기억되는 제 1 기억 영역과, 도포 헤드의 내력 정보가 기억되는 제 2 기억 영역을 포함하는 기억부(33)를 가지고 있다. 제어부는, 제 1 기억 영역으로부터 고유 정보를 판독함과 함께, 도포 헤드의 도포 동작에 따라 내력 정보를 제 2 기억 영역에 저장한다.</description><subject>APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL</subject><subject>APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL</subject><subject>CONTROL OR REGULATING SYSTEMS IN GENERAL</subject><subject>CONTROLLING</subject><subject>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</subject><subject>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICS</subject><subject>PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL</subject><subject>REGULATING</subject><subject>SPRAYING OR ATOMISING IN GENERAL</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHBz9ncM8fRzV3AMCHAMcgwJDVaAifi6hnj4uyg4-rko-Dr6Obq7-rr6hSgERwaHuPoq-LvB1Xm4OrrwMLCmJeYUp_JCaW4GZTfXEGcP3dSC_PjU4oLE5NS81JJ47yAjAyNDAwNLA0MDM0dj4lQBAEGrLNA</recordid><startdate>20210719</startdate><enddate>20210719</enddate><creator>OHDAIRA NAOKI</creator><creator>SHIRAISHI TAKASHI</creator><creator>KAWASUMI YUKIHIRO</creator><creator>MURAI TOSHINOBU</creator><scope>EVB</scope></search><sort><creationdate>20210719</creationdate><title>COATING APPARATUS COATING METHOD AND MANAGEMENT SYSTEM OF COATING HEAD</title><author>OHDAIRA NAOKI ; SHIRAISHI TAKASHI ; KAWASUMI YUKIHIRO ; MURAI TOSHINOBU</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20210090106A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2021</creationdate><topic>APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL</topic><topic>APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL</topic><topic>CONTROL OR REGULATING SYSTEMS IN GENERAL</topic><topic>CONTROLLING</topic><topic>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</topic><topic>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICS</topic><topic>PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL</topic><topic>REGULATING</topic><topic>SPRAYING OR ATOMISING IN GENERAL</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>OHDAIRA NAOKI</creatorcontrib><creatorcontrib>SHIRAISHI TAKASHI</creatorcontrib><creatorcontrib>KAWASUMI YUKIHIRO</creatorcontrib><creatorcontrib>MURAI TOSHINOBU</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>OHDAIRA NAOKI</au><au>SHIRAISHI TAKASHI</au><au>KAWASUMI YUKIHIRO</au><au>MURAI TOSHINOBU</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>COATING APPARATUS COATING METHOD AND MANAGEMENT SYSTEM OF COATING HEAD</title><date>2021-07-19</date><risdate>2021</risdate><abstract>The present invention provides a coating apparatus, a coating method, and a coating head management system. According to the present invention, the state of a coating head is appropriately managed. The coating apparatus (11) comprises: a holding table (21) for holding a substrate (70); a coating unit (coating head unit (22)) that coats a coating material on the substrate held by the holding table; and a control unit (50) that performs control such that the coating material is applied to a predetermined region of the substrate by moving the substrate and the coating unit relative to each other. The coating head (31) for coating a coating material on the substrate is detachably mounted on the coating part. The coating head has a storage unit (33) including a first storage area in which unique information of the coating head is stored, and a second storage area in which history information of the coating head is stored. The control unit reads the unique information from the first storage area, and stores the unique information in the second storage area according to the coating operation of the coating head.
[과제] 도포 헤드의 상태를 적합하게 관리한다. [해결 수단] 도포 장치(11)는, 기판(70)을 보지하는 보지 테이블(21)과, 보지 테이블에 보지되어 있는 기판에 도포재를 도포하는 도포부(도포 헤드 유닛(22))와, 기판과 도포부를 상대적으로 이동하는 것에 의해 기판의 소정 영역에 도포재를 도포하도록 제어하는 제어부(50)를 구비하고 있다. 도포부에는, 기판에 도포재를 도포하기 위한 도포 헤드(31)가 착탈 자유롭게 장착되어 있다. 도포 헤드는, 도포 헤드의 고유 정보가 기억되는 제 1 기억 영역과, 도포 헤드의 내력 정보가 기억되는 제 2 기억 영역을 포함하는 기억부(33)를 가지고 있다. 제어부는, 제 1 기억 영역으로부터 고유 정보를 판독함과 함께, 도포 헤드의 도포 동작에 따라 내력 정보를 제 2 기억 영역에 저장한다.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PERFORMING OPERATIONS PHYSICS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL REGULATING SPRAYING OR ATOMISING IN GENERAL TRANSPORTING |
| title | COATING APPARATUS COATING METHOD AND MANAGEMENT SYSTEM OF COATING HEAD |
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