APPARATUS FOR CONTROLLING TEMPERATURE OF SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE COMPRISING THE SAME

Disclosed is an apparatus for processing a substrate, capable of simplifying the circuit structure of a substrate temperature control device. The apparatus for processing a substrate according to the present invention includes: a chamber having a processing space for processing a substrate therein;...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PARK TAE DONG, KONG BYEONG HYEON, JU YUNSIK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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