ELECTRON MICROSCOPE STAGE

A positioning system for an electron microscope includes a first carriage and a second carriage including a holder for fixing a workpiece. The first carriage is coupled to one or more first drive units configured to position a workpiece along first, second, and third axes and along a first tilt axis...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	VISSCHER ALBERT
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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