ELECTRON MICROSCOPE STAGE

A positioning system for an electron microscope includes a first carriage and a second carriage including a holder for fixing a workpiece. The first carriage is coupled to one or more first drive units configured to position a workpiece along first, second, and third axes and along a first tilt axis...

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description A positioning system for an electron microscope includes a first carriage and a second carriage including a holder for fixing a workpiece. The first carriage is coupled to one or more first drive units configured to position a workpiece along first, second, and third axes and along a first tilt axis. The second carriage is coupled to the one or more drive units configured to receive the one or more first drive units and position the workpiece along the first tilt axis. The positioning system can move and position the workpiece. 전자 현미경을 위한 포지셔닝 시스템은 피가공물을 고정하기 위한 홀더를 포함하는 제1 캐리지 및 제2 캐리지를 포함한다. 제1 캐리지는 제1, 제2 및 제3 축을 따라 그리고 제1 틸트 축에 따라 피가공물을 위치시키도록 구성된 하나 이상의 제1 구동 유닛들에 결합된다. 제2 캐리지는 하나 이상의 제1 구동 유닛들을 수용하고 제1 틸트 축을 따라 피가공물을 위치시키도록 구성된 하나 이상의 구동 유닛들에 결합된다.
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The first carriage is coupled to one or more first drive units configured to position a workpiece along first, second, and third axes and along a first tilt axis. The second carriage is coupled to the one or more drive units configured to receive the one or more first drive units and position the workpiece along the first tilt axis. The positioning system can move and position the workpiece. 전자 현미경을 위한 포지셔닝 시스템은 피가공물을 고정하기 위한 홀더를 포함하는 제1 캐리지 및 제2 캐리지를 포함한다. 제1 캐리지는 제1, 제2 및 제3 축을 따라 그리고 제1 틸트 축에 따라 피가공물을 위치시키도록 구성된 하나 이상의 제1 구동 유닛들에 결합된다. 제2 캐리지는 하나 이상의 제1 구동 유닛들을 수용하고 제1 틸트 축을 따라 피가공물을 위치시키도록 구성된 하나 이상의 구동 유닛들에 결합된다.</description><language>eng ; kor</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20210526&amp;DB=EPODOC&amp;CC=KR&amp;NR=20210060314A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20210526&amp;DB=EPODOC&amp;CC=KR&amp;NR=20210060314A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>VISSCHER ALBERT</creatorcontrib><title>ELECTRON MICROSCOPE STAGE</title><description>A positioning system for an electron microscope includes a first carriage and a second carriage including a holder for fixing a workpiece. The first carriage is coupled to one or more first drive units configured to position a workpiece along first, second, and third axes and along a first tilt axis. The second carriage is coupled to the one or more drive units configured to receive the one or more first drive units and position the workpiece along the first tilt axis. 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The first carriage is coupled to one or more first drive units configured to position a workpiece along first, second, and third axes and along a first tilt axis. The second carriage is coupled to the one or more drive units configured to receive the one or more first drive units and position the workpiece along the first tilt axis. The positioning system can move and position the workpiece. 전자 현미경을 위한 포지셔닝 시스템은 피가공물을 고정하기 위한 홀더를 포함하는 제1 캐리지 및 제2 캐리지를 포함한다. 제1 캐리지는 제1, 제2 및 제3 축을 따라 그리고 제1 틸트 축에 따라 피가공물을 위치시키도록 구성된 하나 이상의 제1 구동 유닛들에 결합된다. 제2 캐리지는 하나 이상의 제1 구동 유닛들을 수용하고 제1 틸트 축을 따라 피가공물을 위치시키도록 구성된 하나 이상의 구동 유닛들에 결합된다.</abstract><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title ELECTRON MICROSCOPE STAGE
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