현수된 검출 요소를 포함하는, 전자기 복사를 검출하기 위한 디바이스를 제조하기 위한 방법
본 발명은 전자기 복사를 검출하기 위한 디바이스를 제조하는 방법에 관한 것으로서, 수직 오리피스(51) 내의 돌출부(2a)의 존재로 인해 관심 층(52)의 연속성에 국소 단절에 의해 형성된 측방향 관통 구멍(54a)을 포함하는 유지 기둥(50) 상에 현수된 검출 요소(80; 60)를 생성하는 단계를 포함한다. A process for fabricating a device for detecting electromagnetic radiation includes the step of providing a detecting element...
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| creator | YON JEAN JACQUES BECKER SEBASTIEN |
| description | 본 발명은 전자기 복사를 검출하기 위한 디바이스를 제조하는 방법에 관한 것으로서, 수직 오리피스(51) 내의 돌출부(2a)의 존재로 인해 관심 층(52)의 연속성에 국소 단절에 의해 형성된 측방향 관통 구멍(54a)을 포함하는 유지 기둥(50) 상에 현수된 검출 요소(80; 60)를 생성하는 단계를 포함한다.
A process for fabricating a device for detecting electromagnetic radiation includes the step of providing a detecting element suspended by a supporting pillar. The pillar has a lateral through-aperture formed via a local break in the continuity of a layer of interest, because of the presence of a jut in a vertical orifice. |
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A process for fabricating a device for detecting electromagnetic radiation includes the step of providing a detecting element suspended by a supporting pillar. The pillar has a lateral through-aperture formed via a local break in the continuity of a layer of interest, because of the presence of a jut in a vertical orifice.</description><language>kor</language><subject>COLORIMETRY ; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT ; MEASURING ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PHYSICS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; RADIATION PYROMETRY ; TESTING ; TRANSPORTING</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210524&DB=EPODOC&CC=KR&NR=20210058991A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76516</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210524&DB=EPODOC&CC=KR&NR=20210058991A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YON JEAN JACQUES</creatorcontrib><creatorcontrib>BECKER SEBASTIEN</creatorcontrib><title>현수된 검출 요소를 포함하는, 전자기 복사를 검출하기 위한 디바이스를 제조하기 위한 방법</title><description>본 발명은 전자기 복사를 검출하기 위한 디바이스를 제조하는 방법에 관한 것으로서, 수직 오리피스(51) 내의 돌출부(2a)의 존재로 인해 관심 층(52)의 연속성에 국소 단절에 의해 형성된 측방향 관통 구멍(54a)을 포함하는 유지 기둥(50) 상에 현수된 검출 요소(80; 60)를 생성하는 단계를 포함한다.
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A process for fabricating a device for detecting electromagnetic radiation includes the step of providing a detecting element suspended by a supporting pillar. The pillar has a lateral through-aperture formed via a local break in the continuity of a layer of interest, because of the presence of a jut in a vertical orifice.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS RADIATION PYROMETRY TESTING TRANSPORTING |
| title | 현수된 검출 요소를 포함하는, 전자기 복사를 검출하기 위한 디바이스를 제조하기 위한 방법 |
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