SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF

The present technology includes a semiconductor memory device and a manufacturing method thereof. The semiconductor memory device comprises: a first laminate including a first hole; a second laminate provided on the first laminate and including a second hole connected to the first hole; a first memo...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KWON IL YOUNG, GWON TAE HONG, BIN JIN HO
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:The present technology includes a semiconductor memory device and a manufacturing method thereof. The semiconductor memory device comprises: a first laminate including a first hole; a second laminate provided on the first laminate and including a second hole connected to the first hole; a first memory layer formed along an inner wall of the first hole; a second memory layer formed along an inner wall of the second hole; and a channel film formed along the inner wall of the first memory film and the inner wall of the second memory film. The channel film has an integrated structure. 본 기술은 제1 홀을 포함하는 제1 적층체; 상기 제1 적층체 상에 제공되고, 상기 제1 홀과 연결되는 제2 홀을 포함하는 제2 적층체; 상기 제1 홀의 내측벽을 따라 형성된 제1 메모리막; 상기 제2 홀의 내측벽을 따라 형성된 제2 메모리막; 및 상기 제1 메모리막의 내측벽 및 제2 메모리막의 내측벽을 따라 형성된 채널막을 포함하고, 상기 채널막은 일체형 구조를 가지는 것을 특징으로 하는 반도체 메모리 장치 및 그의 제조방법을 포함한다.