Photodiode with antireflective and high conductive metal-semiconductor structure Method for manufacturing the same and Solar cell compring the same

According to the present invention, provided are a photodiode using a metal-semiconductor structure which maintains photodiode characteristics thereof even after metal catalytic chemical etching, and has low-reflection and high-conductivity characteristics, a method for manufacturing the same, and a...

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Hauptverfasser: KIM KYUNG HWAN, CHOI KEO ROCK, OH JUNG WOO, KI BU GEUN
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CHOI KEO ROCK
OH JUNG WOO
KI BU GEUN
description According to the present invention, provided are a photodiode using a metal-semiconductor structure which maintains photodiode characteristics thereof even after metal catalytic chemical etching, and has low-reflection and high-conductivity characteristics, a method for manufacturing the same, and a solar cell using the same. The photodiode of the present invention comprises: a semiconductor substrate having a low-reflective, high-conductivity surface having an electrode forming region to be selectively etched; and a high-conductivity electrode in which a metal catalyst used in a metal catalyst chemical etching process for forming an anti-reflection structure semiconductor substrate is positioned in an etched region of the anti-reflection structure semiconductor substrate. The photodiode of the present invention further comprises: a semiconductor substrate including an electrode forming region to be selectively etched and a light absorption region having a relatively protruding shape as compared to the electrode forming region; and an electrode including a metal catalyst layer positioned on the electrode forming region of the semiconductor substrate through chemical etching of the semiconductor substrate, and allowing a surface of the electrode forming region to have electrical conductivity. 본 발명은 금속촉매 화학식각 이후에도 포토다이오드 특성은 유지되며, 저반사, 고전도성의 특성을 갖는 금속-반도체 구조를 이용한 포토 다이오드, 그 제조 방법 및 이를 이용한 태양 전지를 제공한다. 본 발명의 포토 다이오드는, 선택적으로 식각되는 전극 형성 영역을 갖는 저반사 고전도성 표면을 갖는 반도체 기판;반사방지 구조 반도체 기판을 형성하기 위한 금속촉매화학식각 공정에서 사용된 금속촉매가 반사방지 구조 반도체 기판의 식각 영역에 위치하여 형성되는 고전도 전극;을 포함하는 것이다.선택적으로 식각되는 전극 형성 영역과, 상기 전극 형성 영역에 비하여 상대적으로 돌출된 형상의 광흡수 영역을 포함하는 반도체 기판; 및 상기 반도체 기판에 대한 화학적 식각을 통해 상기 반도체 기판의 전극 형성 영역 위에 위치하는 금속 촉매층을 포함하며, 상기 전극 형성 영역의 표면이 전기 전도성을 갖도록 하는 전극을 포함한다.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_KR20210015709A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>KR20210015709A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_KR20210015709A3</originalsourceid><addsrcrecordid>eNqNjL0KwjAUhbs4iPoOF5wLaUXEUUQRRBB1LyG5aQL5KcmtPogvbKRd3JzOOR8fZ1q8rzpQkCZIhJchDdyTiagsCjJPzFOCNq0GEbzsB-aQuC0TOjPCECFRzKWPCBckHSSoDB33veJfbHwLpBESd8PnPVgeQaC1-dl1P8K8mChuEy7GnBXL4-GxP5XYhQZTxwV6pOZ8q1ldMVatN2y7W_1nfQCF_1IA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Photodiode with antireflective and high conductive metal-semiconductor structure Method for manufacturing the same and Solar cell compring the same</title><source>esp@cenet</source><creator>KIM KYUNG HWAN ; CHOI KEO ROCK ; OH JUNG WOO ; KI BU GEUN</creator><creatorcontrib>KIM KYUNG HWAN ; CHOI KEO ROCK ; OH JUNG WOO ; KI BU GEUN</creatorcontrib><description>According to the present invention, provided are a photodiode using a metal-semiconductor structure which maintains photodiode characteristics thereof even after metal catalytic chemical etching, and has low-reflection and high-conductivity characteristics, a method for manufacturing the same, and a solar cell using the same. The photodiode of the present invention comprises: a semiconductor substrate having a low-reflective, high-conductivity surface having an electrode forming region to be selectively etched; and a high-conductivity electrode in which a metal catalyst used in a metal catalyst chemical etching process for forming an anti-reflection structure semiconductor substrate is positioned in an etched region of the anti-reflection structure semiconductor substrate. The photodiode of the present invention further comprises: a semiconductor substrate including an electrode forming region to be selectively etched and a light absorption region having a relatively protruding shape as compared to the electrode forming region; and an electrode including a metal catalyst layer positioned on the electrode forming region of the semiconductor substrate through chemical etching of the semiconductor substrate, and allowing a surface of the electrode forming region to have electrical conductivity. 본 발명은 금속촉매 화학식각 이후에도 포토다이오드 특성은 유지되며, 저반사, 고전도성의 특성을 갖는 금속-반도체 구조를 이용한 포토 다이오드, 그 제조 방법 및 이를 이용한 태양 전지를 제공한다. 본 발명의 포토 다이오드는, 선택적으로 식각되는 전극 형성 영역을 갖는 저반사 고전도성 표면을 갖는 반도체 기판;반사방지 구조 반도체 기판을 형성하기 위한 금속촉매화학식각 공정에서 사용된 금속촉매가 반사방지 구조 반도체 기판의 식각 영역에 위치하여 형성되는 고전도 전극;을 포함하는 것이다.선택적으로 식각되는 전극 형성 영역과, 상기 전극 형성 영역에 비하여 상대적으로 돌출된 형상의 광흡수 영역을 포함하는 반도체 기판; 및 상기 반도체 기판에 대한 화학적 식각을 통해 상기 반도체 기판의 전극 형성 영역 위에 위치하는 금속 촉매층을 포함하며, 상기 전극 형성 영역의 표면이 전기 전도성을 갖도록 하는 전극을 포함한다.</description><language>eng ; kor</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20210210&amp;DB=EPODOC&amp;CC=KR&amp;NR=20210015709A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20210210&amp;DB=EPODOC&amp;CC=KR&amp;NR=20210015709A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KIM KYUNG HWAN</creatorcontrib><creatorcontrib>CHOI KEO ROCK</creatorcontrib><creatorcontrib>OH JUNG WOO</creatorcontrib><creatorcontrib>KI BU GEUN</creatorcontrib><title>Photodiode with antireflective and high conductive metal-semiconductor structure Method for manufacturing the same and Solar cell compring the same</title><description>According to the present invention, provided are a photodiode using a metal-semiconductor structure which maintains photodiode characteristics thereof even after metal catalytic chemical etching, and has low-reflection and high-conductivity characteristics, a method for manufacturing the same, and a solar cell using the same. The photodiode of the present invention comprises: a semiconductor substrate having a low-reflective, high-conductivity surface having an electrode forming region to be selectively etched; and a high-conductivity electrode in which a metal catalyst used in a metal catalyst chemical etching process for forming an anti-reflection structure semiconductor substrate is positioned in an etched region of the anti-reflection structure semiconductor substrate. The photodiode of the present invention further comprises: a semiconductor substrate including an electrode forming region to be selectively etched and a light absorption region having a relatively protruding shape as compared to the electrode forming region; and an electrode including a metal catalyst layer positioned on the electrode forming region of the semiconductor substrate through chemical etching of the semiconductor substrate, and allowing a surface of the electrode forming region to have electrical conductivity. 본 발명은 금속촉매 화학식각 이후에도 포토다이오드 특성은 유지되며, 저반사, 고전도성의 특성을 갖는 금속-반도체 구조를 이용한 포토 다이오드, 그 제조 방법 및 이를 이용한 태양 전지를 제공한다. 본 발명의 포토 다이오드는, 선택적으로 식각되는 전극 형성 영역을 갖는 저반사 고전도성 표면을 갖는 반도체 기판;반사방지 구조 반도체 기판을 형성하기 위한 금속촉매화학식각 공정에서 사용된 금속촉매가 반사방지 구조 반도체 기판의 식각 영역에 위치하여 형성되는 고전도 전극;을 포함하는 것이다.선택적으로 식각되는 전극 형성 영역과, 상기 전극 형성 영역에 비하여 상대적으로 돌출된 형상의 광흡수 영역을 포함하는 반도체 기판; 및 상기 반도체 기판에 대한 화학적 식각을 통해 상기 반도체 기판의 전극 형성 영역 위에 위치하는 금속 촉매층을 포함하며, 상기 전극 형성 영역의 표면이 전기 전도성을 갖도록 하는 전극을 포함한다.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjL0KwjAUhbs4iPoOF5wLaUXEUUQRRBB1LyG5aQL5KcmtPogvbKRd3JzOOR8fZ1q8rzpQkCZIhJchDdyTiagsCjJPzFOCNq0GEbzsB-aQuC0TOjPCECFRzKWPCBckHSSoDB33veJfbHwLpBESd8PnPVgeQaC1-dl1P8K8mChuEy7GnBXL4-GxP5XYhQZTxwV6pOZ8q1ldMVatN2y7W_1nfQCF_1IA</recordid><startdate>20210210</startdate><enddate>20210210</enddate><creator>KIM KYUNG HWAN</creator><creator>CHOI KEO ROCK</creator><creator>OH JUNG WOO</creator><creator>KI BU GEUN</creator><scope>EVB</scope></search><sort><creationdate>20210210</creationdate><title>Photodiode with antireflective and high conductive metal-semiconductor structure Method for manufacturing the same and Solar cell compring the same</title><author>KIM KYUNG HWAN ; CHOI KEO ROCK ; OH JUNG WOO ; KI BU GEUN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20210015709A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2021</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>KIM KYUNG HWAN</creatorcontrib><creatorcontrib>CHOI KEO ROCK</creatorcontrib><creatorcontrib>OH JUNG WOO</creatorcontrib><creatorcontrib>KI BU GEUN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KIM KYUNG HWAN</au><au>CHOI KEO ROCK</au><au>OH JUNG WOO</au><au>KI BU GEUN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Photodiode with antireflective and high conductive metal-semiconductor structure Method for manufacturing the same and Solar cell compring the same</title><date>2021-02-10</date><risdate>2021</risdate><abstract>According to the present invention, provided are a photodiode using a metal-semiconductor structure which maintains photodiode characteristics thereof even after metal catalytic chemical etching, and has low-reflection and high-conductivity characteristics, a method for manufacturing the same, and a solar cell using the same. The photodiode of the present invention comprises: a semiconductor substrate having a low-reflective, high-conductivity surface having an electrode forming region to be selectively etched; and a high-conductivity electrode in which a metal catalyst used in a metal catalyst chemical etching process for forming an anti-reflection structure semiconductor substrate is positioned in an etched region of the anti-reflection structure semiconductor substrate. The photodiode of the present invention further comprises: a semiconductor substrate including an electrode forming region to be selectively etched and a light absorption region having a relatively protruding shape as compared to the electrode forming region; and an electrode including a metal catalyst layer positioned on the electrode forming region of the semiconductor substrate through chemical etching of the semiconductor substrate, and allowing a surface of the electrode forming region to have electrical conductivity. 본 발명은 금속촉매 화학식각 이후에도 포토다이오드 특성은 유지되며, 저반사, 고전도성의 특성을 갖는 금속-반도체 구조를 이용한 포토 다이오드, 그 제조 방법 및 이를 이용한 태양 전지를 제공한다. 본 발명의 포토 다이오드는, 선택적으로 식각되는 전극 형성 영역을 갖는 저반사 고전도성 표면을 갖는 반도체 기판;반사방지 구조 반도체 기판을 형성하기 위한 금속촉매화학식각 공정에서 사용된 금속촉매가 반사방지 구조 반도체 기판의 식각 영역에 위치하여 형성되는 고전도 전극;을 포함하는 것이다.선택적으로 식각되는 전극 형성 영역과, 상기 전극 형성 영역에 비하여 상대적으로 돌출된 형상의 광흡수 영역을 포함하는 반도체 기판; 및 상기 반도체 기판에 대한 화학적 식각을 통해 상기 반도체 기판의 전극 형성 영역 위에 위치하는 금속 촉매층을 포함하며, 상기 전극 형성 영역의 표면이 전기 전도성을 갖도록 하는 전극을 포함한다.</abstract><oa>free_for_read</oa></addata></record>
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ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Photodiode with antireflective and high conductive metal-semiconductor structure Method for manufacturing the same and Solar cell compring the same
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T11%3A02%3A19IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=KIM%20KYUNG%20HWAN&rft.date=2021-02-10&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EKR20210015709A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true