DESIGN APPLICATIONS OF BURIED POWER RAILS

A semiconductor device includes a substrate, one or more transistors, a metal layer, one or more buried power rails, and at least one wall-via structure. The transistors and the metal layer are manufactured above a top surface of the substrate. The buried power rails are in one or more corresponding...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	VADI VASISHT M
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!