SEAL RINGS IN ELECTROCHEMICAL PROCESSORS

A seal ring for an electrochemical processor does not slip or deflect laterally when pressed against the wafer surface. The seal ring may be installed on a rotor of the processor, and has an outer wall jointed to a tip arc through an end. The outer wall may be a straight wall. A relatively rigid sup...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MATTINGER GEORGE, ZIMMERMAN NOLAN L, WILSON GREGORY J, ENGLHARDT ERIC A, RAMASAMY BALAMURUGAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS THEREFOR CHEMISTRY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!