X-RAY SYSTEM INCLUDING FILTER

Provided is an X-ray system. The present X-ray system comprises: an x-ray tube emitting X-rays; a filter which absorbs a portion of the X-rays and passes the portion of the X-rays; a cradle in which a semiconductor product is located; a detector which senses the X-rays passing through the semiconduc...

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Hauptverfasser: PARK HYO JUN, MIN CHUL HEE, RHEW KEUN HO, LEE HYUN YOUNG, KIM JUNG KI, LIM HEON SANG, JANG IL OH, CHOI HYUN JOON
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creator PARK HYO JUN
MIN CHUL HEE
RHEW KEUN HO
LEE HYUN YOUNG
KIM JUNG KI
LIM HEON SANG
JANG IL OH
CHOI HYUN JOON
description Provided is an X-ray system. The present X-ray system comprises: an x-ray tube emitting X-rays; a filter which absorbs a portion of the X-rays and passes the portion of the X-rays; a cradle in which a semiconductor product is located; a detector which senses the X-rays passing through the semiconductor product and the cradle; and a display which displays the X-rays detected at the detector as an image. The filter comprises a first metal layer, and a second metal layer on the first metal layer. The first metal layer includes at least one of zinc (Zn), zirconium (Zr), and molybdenum (Mo). The second metal layer includes tungsten (W). 엑스레이 시스템을 제공한다. 이 엑스레이 시스템은 엑스레이를 방출하는 엑스레이 튜브; 상기 엑스레이의 일부를 흡수하고 상기 엑스레이의 일부를 통과시키는 필터; 반도체 제품이 위치하는 거치대; 상기 반도체 제품 및 상기 거치대를 통과하는 엑스레이를 감지하는 검출기; 및 상기 검출기에서 감지된 엑스레이를 영상으로 나타내는 디스플레이를 포함한다. 상기 필터는 제1 금속 층 및 상기 제1 금속 층 상의 제2 금속 층을 포함하고, 상기 제1 금속 층은 아연(Zn), 지르코늄(Zr) 및 몰리브덴(Mo) 중 적어도 하나의 물질을 포함하고, 상기 제2 금속 층은 텅스텐(W)을 포함한다.
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The present X-ray system comprises: an x-ray tube emitting X-rays; a filter which absorbs a portion of the X-rays and passes the portion of the X-rays; a cradle in which a semiconductor product is located; a detector which senses the X-rays passing through the semiconductor product and the cradle; and a display which displays the X-rays detected at the detector as an image. The filter comprises a first metal layer, and a second metal layer on the first metal layer. The first metal layer includes at least one of zinc (Zn), zirconium (Zr), and molybdenum (Mo). 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The present X-ray system comprises: an x-ray tube emitting X-rays; a filter which absorbs a portion of the X-rays and passes the portion of the X-rays; a cradle in which a semiconductor product is located; a detector which senses the X-rays passing through the semiconductor product and the cradle; and a display which displays the X-rays detected at the detector as an image. The filter comprises a first metal layer, and a second metal layer on the first metal layer. The first metal layer includes at least one of zinc (Zn), zirconium (Zr), and molybdenum (Mo). The second metal layer includes tungsten (W). 엑스레이 시스템을 제공한다. 이 엑스레이 시스템은 엑스레이를 방출하는 엑스레이 튜브; 상기 엑스레이의 일부를 흡수하고 상기 엑스레이의 일부를 통과시키는 필터; 반도체 제품이 위치하는 거치대; 상기 반도체 제품 및 상기 거치대를 통과하는 엑스레이를 감지하는 검출기; 및 상기 검출기에서 감지된 엑스레이를 영상으로 나타내는 디스플레이를 포함한다. 상기 필터는 제1 금속 층 및 상기 제1 금속 층 상의 제2 금속 층을 포함하고, 상기 제1 금속 층은 아연(Zn), 지르코늄(Zr) 및 몰리브덴(Mo) 중 적어도 하나의 물질을 포함하고, 상기 제2 금속 층은 텅스텐(W)을 포함한다.</abstract><oa>free_for_read</oa></addata></record>
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title X-RAY SYSTEM INCLUDING FILTER
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