OPTICAL INTERFEROMETER
Disclosed is an optical interference system capable of improving measuring precision. According to the present invention, the optical interference system may comprise: a light source generating light; a main interferometer making a measurement light reflected from a sample by an object lens and a re...
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| creator | PARK JAE SEOK YOO JEONG SOO |
| description | Disclosed is an optical interference system capable of improving measuring precision. According to the present invention, the optical interference system may comprise: a light source generating light; a main interferometer making a measurement light reflected from a sample by an object lens and a reference light reflected from a reference mirror among the lights generated by the light source to interfere, thereby generating a main interference signal; an auxiliary interferometer making measurement lights for vibration and noise, which are reflected from an auxiliary mirror adjacent to the sample and an auxiliary mirror adjacent to the reference mirror, respectively to measure a vibration signal and/or an undesired noise signal among the light headed towards the reference mirror and the light generated by the light source and headed towards the sample, to interfere, thereby generating an auxiliary interference signal; a detection unit detecting the main interference signal and the auxiliary interference signal; and a control unit, when the optical axis-directional positions of the main interference signal and the auxiliary interference signal determined from an optical spectrum analysis on the main interference signal and the auxiliary interference signal are the optical axis-directional position including the vibration signal and/or the undesired noise signal, changing the optical axis-directional position of the main interference signal to the original optical axis-directional position as much as the amount of change of the optical axis-directional position of the auxiliary interference signal.
광 간섭 시스템이 개시된다. 광 간섭 시스템은, 광을 발생시키는 광원; 광원으로부터 발생된 광 중 대물렌즈에 의해 샘플에 반사된 측정광과 기준미러에 반사된 기준광을 간섭시켜 메인 간섭신호를 발생시키는 메인 간섭계; 광원으로부터 발생되어 샘플로 향하는 광과 기준미러로 향하는 광중 진동신호 및/또는 원하지 않는 잡음신호를 측정하기 위해 샘플에 인접한 보조미러와 기준미러에 인접한 보조미러에 각각 반사된 진동 잡음용 측정광을 간섭시켜 보조 간섭신호를 발생시키는 보조 간섭계; 메인 간섭신호와 보조 간섭신호를 감지하는 감지부; 및 메인 간섭신호와 보조 간섭신호에 대한 광 스펙트럼 분석으로부터 결정되는 메인 간섭신호와 보조 간섭신호의 광축방향 위치가 진동신호 및/또는 원하지 않는 잡음신호가 포함된 광축방향 위치이면, 보조 간섭신호의 광축방향 위치 변화량 만큼 메인 간섭신호의 광축방향 위치를 본래의 광축방향 위치로 변경하는 제어부를 포함할 수 있다. |
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광 간섭 시스템이 개시된다. 광 간섭 시스템은, 광을 발생시키는 광원; 광원으로부터 발생된 광 중 대물렌즈에 의해 샘플에 반사된 측정광과 기준미러에 반사된 기준광을 간섭시켜 메인 간섭신호를 발생시키는 메인 간섭계; 광원으로부터 발생되어 샘플로 향하는 광과 기준미러로 향하는 광중 진동신호 및/또는 원하지 않는 잡음신호를 측정하기 위해 샘플에 인접한 보조미러와 기준미러에 인접한 보조미러에 각각 반사된 진동 잡음용 측정광을 간섭시켜 보조 간섭신호를 발생시키는 보조 간섭계; 메인 간섭신호와 보조 간섭신호를 감지하는 감지부; 및 메인 간섭신호와 보조 간섭신호에 대한 광 스펙트럼 분석으로부터 결정되는 메인 간섭신호와 보조 간섭신호의 광축방향 위치가 진동신호 및/또는 원하지 않는 잡음신호가 포함된 광축방향 위치이면, 보조 간섭신호의 광축방향 위치 변화량 만큼 메인 간섭신호의 광축방향 위치를 본래의 광축방향 위치로 변경하는 제어부를 포함할 수 있다.</description><language>eng ; kor</language><subject>MEASURING ; MEASURING ANGLES ; MEASURING AREAS ; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ; PHYSICS ; TESTING</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200420&DB=EPODOC&CC=KR&NR=20200040680A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200420&DB=EPODOC&CC=KR&NR=20200040680A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>PARK JAE SEOK</creatorcontrib><creatorcontrib>YOO JEONG SOO</creatorcontrib><title>OPTICAL INTERFEROMETER</title><description>Disclosed is an optical interference system capable of improving measuring precision. According to the present invention, the optical interference system may comprise: a light source generating light; a main interferometer making a measurement light reflected from a sample by an object lens and a reference light reflected from a reference mirror among the lights generated by the light source to interfere, thereby generating a main interference signal; an auxiliary interferometer making measurement lights for vibration and noise, which are reflected from an auxiliary mirror adjacent to the sample and an auxiliary mirror adjacent to the reference mirror, respectively to measure a vibration signal and/or an undesired noise signal among the light headed towards the reference mirror and the light generated by the light source and headed towards the sample, to interfere, thereby generating an auxiliary interference signal; a detection unit detecting the main interference signal and the auxiliary interference signal; and a control unit, when the optical axis-directional positions of the main interference signal and the auxiliary interference signal determined from an optical spectrum analysis on the main interference signal and the auxiliary interference signal are the optical axis-directional position including the vibration signal and/or the undesired noise signal, changing the optical axis-directional position of the main interference signal to the original optical axis-directional position as much as the amount of change of the optical axis-directional position of the auxiliary interference signal.
광 간섭 시스템이 개시된다. 광 간섭 시스템은, 광을 발생시키는 광원; 광원으로부터 발생된 광 중 대물렌즈에 의해 샘플에 반사된 측정광과 기준미러에 반사된 기준광을 간섭시켜 메인 간섭신호를 발생시키는 메인 간섭계; 광원으로부터 발생되어 샘플로 향하는 광과 기준미러로 향하는 광중 진동신호 및/또는 원하지 않는 잡음신호를 측정하기 위해 샘플에 인접한 보조미러와 기준미러에 인접한 보조미러에 각각 반사된 진동 잡음용 측정광을 간섭시켜 보조 간섭신호를 발생시키는 보조 간섭계; 메인 간섭신호와 보조 간섭신호를 감지하는 감지부; 및 메인 간섭신호와 보조 간섭신호에 대한 광 스펙트럼 분석으로부터 결정되는 메인 간섭신호와 보조 간섭신호의 광축방향 위치가 진동신호 및/또는 원하지 않는 잡음신호가 포함된 광축방향 위치이면, 보조 간섭신호의 광축방향 위치 변화량 만큼 메인 간섭신호의 광축방향 위치를 본래의 광축방향 위치로 변경하는 제어부를 포함할 수 있다.</description><subject>MEASURING</subject><subject>MEASURING ANGLES</subject><subject>MEASURING AREAS</subject><subject>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</subject><subject>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBDzDwjxdHb0UfD0C3ENcnMN8vd1BTJ4GFjTEnOKU3mhNDeDsptriLOHbmpBfnxqcUFicmpeakm8d5CRgZGBgYGJgZmFgaMxcaoAQIEgHA</recordid><startdate>20200420</startdate><enddate>20200420</enddate><creator>PARK JAE SEOK</creator><creator>YOO JEONG SOO</creator><scope>EVB</scope></search><sort><creationdate>20200420</creationdate><title>OPTICAL INTERFEROMETER</title><author>PARK JAE SEOK ; YOO JEONG SOO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20200040680A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2020</creationdate><topic>MEASURING</topic><topic>MEASURING ANGLES</topic><topic>MEASURING AREAS</topic><topic>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</topic><topic>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>PARK JAE SEOK</creatorcontrib><creatorcontrib>YOO JEONG SOO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>PARK JAE SEOK</au><au>YOO JEONG SOO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>OPTICAL INTERFEROMETER</title><date>2020-04-20</date><risdate>2020</risdate><abstract>Disclosed is an optical interference system capable of improving measuring precision. According to the present invention, the optical interference system may comprise: a light source generating light; a main interferometer making a measurement light reflected from a sample by an object lens and a reference light reflected from a reference mirror among the lights generated by the light source to interfere, thereby generating a main interference signal; an auxiliary interferometer making measurement lights for vibration and noise, which are reflected from an auxiliary mirror adjacent to the sample and an auxiliary mirror adjacent to the reference mirror, respectively to measure a vibration signal and/or an undesired noise signal among the light headed towards the reference mirror and the light generated by the light source and headed towards the sample, to interfere, thereby generating an auxiliary interference signal; a detection unit detecting the main interference signal and the auxiliary interference signal; and a control unit, when the optical axis-directional positions of the main interference signal and the auxiliary interference signal determined from an optical spectrum analysis on the main interference signal and the auxiliary interference signal are the optical axis-directional position including the vibration signal and/or the undesired noise signal, changing the optical axis-directional position of the main interference signal to the original optical axis-directional position as much as the amount of change of the optical axis-directional position of the auxiliary interference signal.
광 간섭 시스템이 개시된다. 광 간섭 시스템은, 광을 발생시키는 광원; 광원으로부터 발생된 광 중 대물렌즈에 의해 샘플에 반사된 측정광과 기준미러에 반사된 기준광을 간섭시켜 메인 간섭신호를 발생시키는 메인 간섭계; 광원으로부터 발생되어 샘플로 향하는 광과 기준미러로 향하는 광중 진동신호 및/또는 원하지 않는 잡음신호를 측정하기 위해 샘플에 인접한 보조미러와 기준미러에 인접한 보조미러에 각각 반사된 진동 잡음용 측정광을 간섭시켜 보조 간섭신호를 발생시키는 보조 간섭계; 메인 간섭신호와 보조 간섭신호를 감지하는 감지부; 및 메인 간섭신호와 보조 간섭신호에 대한 광 스펙트럼 분석으로부터 결정되는 메인 간섭신호와 보조 간섭신호의 광축방향 위치가 진동신호 및/또는 원하지 않는 잡음신호가 포함된 광축방향 위치이면, 보조 간섭신호의 광축방향 위치 변화량 만큼 메인 간섭신호의 광축방향 위치를 본래의 광축방향 위치로 변경하는 제어부를 포함할 수 있다.</abstract><oa>free_for_read</oa></addata></record> |
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| title | OPTICAL INTERFEROMETER |
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