SUBSTRATE RETAINING APPARATUS SYSTEM INCLUDING THE APPARATUS AND METHOD OF USING SAME

Disclosed are a substrate retaining apparatus, a load lock assembly comprising the substrate retaining apparatus, and a system including the substrate retaining apparatus. The substrate retaining apparatus can include at least one sidewall and one or more heat shield plates. One or more of among the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MURALIDHAR SHIVA K. T. RAJAVELU, KIM SAM, WILSON JR. JAMES KING, ROBINSON JEFFREY BARRETT, SONJE NINAD VIJAY
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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