SUBSTRATE TREATING APPARATUS AND FILTER UNIT USING THE SAME

The present invention relates to a substrate processing apparatus and a filter unit used therein. The substrate processing apparatus, in which a liquid chemical applying process with respect to a substrate to be processed is performed, includes: a liquid chemical processing unit processing liquid ch...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	CHO KANG IL
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING
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