The method of repairing for susceptor

The present invention relates to a substrate processing apparatus and, more particularly, to a susceptor repairing method for repairing a susceptor of the substrate processing apparatus. According to the present invention, a susceptor has at least one heating wire member (200) provided therein to be...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GWON JI YEON, KWON YONG CHUL, JUNG MYEONG JIN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!