웨이퍼 유지체
피처리물의 배치면을 상면에 구비한 배치대와 배치대를 하면측으로부터 지지하는 지지 부재와, 한쪽의 단부가 배치대의 하면측에 기밀하게 접합되어 있는 제1 통형 부재와, 제1 통형 부재의 내측에 배치되며, 또한, 한쪽의 단부가 배치대의 하면측에 기밀하게 접합되어 있는 제2 통형 부재를 갖는 웨이퍼 유지체. A wafer holder includes a mounting table that has a mounting surface for a workpiece at a top, a supporting member that supports th...
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| creator | MIKUMO AKIRA KIMURA KOICHI |
| description | 피처리물의 배치면을 상면에 구비한 배치대와 배치대를 하면측으로부터 지지하는 지지 부재와, 한쪽의 단부가 배치대의 하면측에 기밀하게 접합되어 있는 제1 통형 부재와, 제1 통형 부재의 내측에 배치되며, 또한, 한쪽의 단부가 배치대의 하면측에 기밀하게 접합되어 있는 제2 통형 부재를 갖는 웨이퍼 유지체.
A wafer holder includes a mounting table that has a mounting surface for a workpiece at a top, a supporting member that supports the mounting table from a lower side, a first cylindrical member one end of which is joined hermetically to a lower surface of the mounting table, and a second cylindrical member that is provided inside the first cylindrical member and one end of which is joined hermetically to the lower surface of the mounting table. |
| format | Patent |
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A wafer holder includes a mounting table that has a mounting surface for a workpiece at a top, a supporting member that supports the mounting table from a lower side, a first cylindrical member one end of which is joined hermetically to a lower surface of the mounting table, and a second cylindrical member that is provided inside the first cylindrical member and one end of which is joined hermetically to the lower surface of the mounting table.</description><language>kor</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRIC HEATING ; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2019</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190722&DB=EPODOC&CC=KR&NR=20190086368A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25544,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190722&DB=EPODOC&CC=KR&NR=20190086368A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MIKUMO AKIRA</creatorcontrib><creatorcontrib>KIMURA KOICHI</creatorcontrib><title>웨이퍼 유지체</title><description>피처리물의 배치면을 상면에 구비한 배치대와 배치대를 하면측으로부터 지지하는 지지 부재와, 한쪽의 단부가 배치대의 하면측에 기밀하게 접합되어 있는 제1 통형 부재와, 제1 통형 부재의 내측에 배치되며, 또한, 한쪽의 단부가 배치대의 하면측에 기밀하게 접합되어 있는 제2 통형 부재를 갖는 웨이퍼 유지체.
A wafer holder includes a mounting table that has a mounting surface for a workpiece at a top, a supporting member that supports the mounting table from a lower side, a first cylindrical member one end of which is joined hermetically to a lower surface of the mounting table, and a second cylindrical member that is provided inside the first cylindrical member and one end of which is joined hermetically to the lower surface of the mounting table.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRIC HEATING</subject><subject>ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2019</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBB-M3vFm7lb3vbuUXgzZ8Gb5Q1vNm3hYWBNS8wpTuWF0twMym6uIc4euqkF-fGpxQWJyal5qSXx3kFGBoaWBgYWZsZmFo7GxKkCAAK3Jzs</recordid><startdate>20190722</startdate><enddate>20190722</enddate><creator>MIKUMO AKIRA</creator><creator>KIMURA KOICHI</creator><scope>EVB</scope></search><sort><creationdate>20190722</creationdate><title>웨이퍼 유지체</title><author>MIKUMO AKIRA ; KIMURA KOICHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20190086368A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>kor</language><creationdate>2019</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRIC HEATING</topic><topic>ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>MIKUMO AKIRA</creatorcontrib><creatorcontrib>KIMURA KOICHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>MIKUMO AKIRA</au><au>KIMURA KOICHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>웨이퍼 유지체</title><date>2019-07-22</date><risdate>2019</risdate><abstract>피처리물의 배치면을 상면에 구비한 배치대와 배치대를 하면측으로부터 지지하는 지지 부재와, 한쪽의 단부가 배치대의 하면측에 기밀하게 접합되어 있는 제1 통형 부재와, 제1 통형 부재의 내측에 배치되며, 또한, 한쪽의 단부가 배치대의 하면측에 기밀하게 접합되어 있는 제2 통형 부재를 갖는 웨이퍼 유지체.
A wafer holder includes a mounting table that has a mounting surface for a workpiece at a top, a supporting member that supports the mounting table from a lower side, a first cylindrical member one end of which is joined hermetically to a lower surface of the mounting table, and a second cylindrical member that is provided inside the first cylindrical member and one end of which is joined hermetically to the lower surface of the mounting table.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | 웨이퍼 유지체 |
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