FUNCTIONALIZED METAL OXIDE MANUFACTURING METHOD AND UV SENSOR MANUFACTURED THEREOF
본 발명은 레이저를 이용하여 나노구조물의 산화에 따른 금속산화물을 제조하고, 금속산화물의 산화 과정을 모니터링하는 기능성 금속산화물 제조 방법 및 이에 의해 제조된 전자소자에 관한 것으로, 미리 패턴된 나노구조물에 후처리 공법을 이용하여 특정 부분에 산화를 진행할 수 있다....
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| creator | KWON, KYUNG MOOK SHIM, JAE HO PARK, JUNG HOON YU, KYOUNG SIK |
| description | 본 발명은 레이저를 이용하여 나노구조물의 산화에 따른 금속산화물을 제조하고, 금속산화물의 산화 과정을 모니터링하는 기능성 금속산화물 제조 방법 및 이에 의해 제조된 전자소자에 관한 것으로, 미리 패턴된 나노구조물에 후처리 공법을 이용하여 특정 부분에 산화를 진행할 수 있다. |
| format | Patent |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | FUNCTIONALIZED METAL OXIDE MANUFACTURING METHOD AND UV SENSOR MANUFACTURED THEREOF |
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