ILLUMINATION OPTICAL APPARATUS EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
조명 광학 장치(13)는 광원(12)으로부터 출력된 노광광(EL)을 피조사 물체(R)로 유도한다. 조명 광학 장치(13)는 어레이 형상으로 배열되는 복수의 공간 광 변조 부재(22)를 갖고 있으며, 각각의 공간 광 변조 부재(22)는 각각이 이동 가능 반사면을 갖고 있는 복수의 반사 광학 소자가 어레이 형상으로 배열되도록 구성된다. 공간 광 변조 부재 중 적어도 하나는 광원으로부터 출력된 광의 광로 내에 배치된다. An illumination optical apparatus (13) guides exposure light (EL)...
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| creator | HIROTA HIROYUKI |
| description | 조명 광학 장치(13)는 광원(12)으로부터 출력된 노광광(EL)을 피조사 물체(R)로 유도한다. 조명 광학 장치(13)는 어레이 형상으로 배열되는 복수의 공간 광 변조 부재(22)를 갖고 있으며, 각각의 공간 광 변조 부재(22)는 각각이 이동 가능 반사면을 갖고 있는 복수의 반사 광학 소자가 어레이 형상으로 배열되도록 구성된다. 공간 광 변조 부재 중 적어도 하나는 광원으로부터 출력된 광의 광로 내에 배치된다.
An illumination optical apparatus (13) guides exposure light (EL) emitted from an exposure light source (12), to an illumination target object (R). The illumination optical apparatus (13) has a plurality of spatial light modulation members (22) arranged in an array form, and each spatial light modulation member (22) is so configured that a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members is arranged in an optical path of the light emitted from the light source. |
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An illumination optical apparatus (13) guides exposure light (EL) emitted from an exposure light source (12), to an illumination target object (R). The illumination optical apparatus (13) has a plurality of spatial light modulation members (22) arranged in an array form, and each spatial light modulation member (22) is so configured that a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members is arranged in an optical path of the light emitted from the light source.</description><language>eng ; kor</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; CINEMATOGRAPHY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS</subject><creationdate>2018</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20181205&DB=EPODOC&CC=KR&NR=20180129981A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20181205&DB=EPODOC&CC=KR&NR=20180129981A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HIROTA HIROYUKI</creatorcontrib><title>ILLUMINATION OPTICAL APPARATUS EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD</title><description>조명 광학 장치(13)는 광원(12)으로부터 출력된 노광광(EL)을 피조사 물체(R)로 유도한다. 조명 광학 장치(13)는 어레이 형상으로 배열되는 복수의 공간 광 변조 부재(22)를 갖고 있으며, 각각의 공간 광 변조 부재(22)는 각각이 이동 가능 반사면을 갖고 있는 복수의 반사 광학 소자가 어레이 형상으로 배열되도록 구성된다. 공간 광 변조 부재 중 적어도 하나는 광원으로부터 출력된 광의 광로 내에 배치된다.
An illumination optical apparatus (13) guides exposure light (EL) emitted from an exposure light source (12), to an illumination target object (R). The illumination optical apparatus (13) has a plurality of spatial light modulation members (22) arranged in an array form, and each spatial light modulation member (22) is so configured that a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members is arranged in an optical path of the light emitted from the light source.</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>CINEMATOGRAPHY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2018</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZAj09PEJ9fX0cwzx9PdT8A8I8XR29FFwDAhwDHIMCQ1WcI0I8A8ODXJFEnL0c1FwcQ3zdHZV8HX0C3VzdA4JDfL0c1fwdQ3x8HfhYWBNS8wpTuWF0twMym6uIc4euqkF-fGpxQWJyal5qSXx3kFGBoYWBoZGlpYWho7GxKkCAKf7MLw</recordid><startdate>20181205</startdate><enddate>20181205</enddate><creator>HIROTA HIROYUKI</creator><scope>EVB</scope></search><sort><creationdate>20181205</creationdate><title>ILLUMINATION OPTICAL APPARATUS EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD</title><author>HIROTA HIROYUKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20180129981A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2018</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>CINEMATOGRAPHY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>HIROTA HIROYUKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HIROTA HIROYUKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>ILLUMINATION OPTICAL APPARATUS EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD</title><date>2018-12-05</date><risdate>2018</risdate><abstract>조명 광학 장치(13)는 광원(12)으로부터 출력된 노광광(EL)을 피조사 물체(R)로 유도한다. 조명 광학 장치(13)는 어레이 형상으로 배열되는 복수의 공간 광 변조 부재(22)를 갖고 있으며, 각각의 공간 광 변조 부재(22)는 각각이 이동 가능 반사면을 갖고 있는 복수의 반사 광학 소자가 어레이 형상으로 배열되도록 구성된다. 공간 광 변조 부재 중 적어도 하나는 광원으로부터 출력된 광의 광로 내에 배치된다.
An illumination optical apparatus (13) guides exposure light (EL) emitted from an exposure light source (12), to an illumination target object (R). The illumination optical apparatus (13) has a plurality of spatial light modulation members (22) arranged in an array form, and each spatial light modulation member (22) is so configured that a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members is arranged in an optical path of the light emitted from the light source.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| title | ILLUMINATION OPTICAL APPARATUS EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD |
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