METHOD FOR MEASURING COMPOSITION CONTENTS BY DEPTH OF SPECIMEN

The present invention provides a method of measuring composition contents constituting a specimen by a depth of the specimen from an energy spectrum of an ion beam scattered after colliding with the specimen. The method includes: a profile formation step of forming a spectrum profile for each of com...

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Bibliographische Detailangaben
Hauptverfasser:	MIN, WON JA, KIM, SOO BANG, PARK, KYUNG SU, KIM, SEUNG GYUN, KIM, JONG HUN, YU, KYU SANG, JUNG, KWANG HWAN, SIM, CHANG SIK, KIM, WAN SUP, KIM, JWA SOON, AN, SUNG YUP
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	The present invention provides a method of measuring composition contents constituting a specimen by a depth of the specimen from an energy spectrum of an ion beam scattered after colliding with the specimen. The method includes: a profile formation step of forming a spectrum profile for each of compositions by counting a number of energy regions obtained by dividing an energy region shown in an energy spectrum of each of the compositions by a predetermined reference content and displaying the number of energy regions by a depth of a specimen; and a composition content calculation step of calculating a composition content by the depth of the specimen by comparing spectrum profiles of the compositions with each other. 본 발명은 시편과 충돌한 후 산란되는 이온빔의 에너지 스펙트럼으로부터 상기 시편의 깊이별로 상기 시편을 구성하는 조성물의 함량을 측정하는 방법으로서, 조성물 각각의 에너지 스펙트럼에 나타난 에너지 영역을 기설정된 기준 함량별로 분할하여 얻은 에너지 영역의 개수를 카운팅하여 상기 시편의 깊이별로 표시함으로써, 조성물 각각에 대한 스펙트럼 프로파일을 형성하는 프로파일 형성 단계 및 상기 조성물 각각에 대한 스펙트럼 프로파일을 상호 비교하여, 상기 시편의 깊이별로 상기 조성물의 함량을 계산하는 조성물 함량 계산 단계를 포함한다.