Vaporizer and thin film deposition apparatus having the same

The present invention provides a vaporizer comprising: a first body having an upper end narrowed in the height direction; a second body having a cavity in which the first body is accommodated; and a mixing chamber formed between the first body and the second body. The second body includes: a carrier...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NISHIKAWA ICHIRO, LEE, HEOK JAE, OH, JUNG SUK, HAMADA MASASHI, LEE, JUN WON, KIM, HYUNG HO, LEE, TAE HOON, CHOI, SANG JIN, YOUM, JANG HYOUN, TERASAKA MASANORI, KIM, HO GON, SIM, HYUN SIK, KIM, JAE SEOK, SHIN, DONG OK, CHOI, HYUK YUL
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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