MEMS MEMS DEVICES ON FLEXIBLE SUBSTRATE
하나 이상의 MEMS 요소를 포함하는 가요성 필름과 이러한 가요성 필름을 포함하는 물품이 기술된다. 가요성 필름은 2개의 금속 층들 사이에 중합체 층을 포함하며, 이때 금속 층들 중 하나는 천공을 포함한다. 중합체 층은 2개의 금속 층의 상대 운동을 가능하게 하는 공극형 영역들을 포함한다. A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a...
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| creator | BERGERON PHILLIP J MOONEY JUSTINE A GEISSINGER JOHN D GUNDEL DOUGLAS B PALANISWAMY RAVI FOO SIANG SIN LUNCEFORD BRENT D |
| description | 하나 이상의 MEMS 요소를 포함하는 가요성 필름과 이러한 가요성 필름을 포함하는 물품이 기술된다. 가요성 필름은 2개의 금속 층들 사이에 중합체 층을 포함하며, 이때 금속 층들 중 하나는 천공을 포함한다. 중합체 층은 2개의 금속 층의 상대 운동을 가능하게 하는 공극형 영역들을 포함한다.
A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a polymer layer between two metal layers with one of the metal layers containing a perforation. The polymer layer includes voided regions that allow for relative movement of the two metal layers. |
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A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a polymer layer between two metal layers with one of the metal layers containing a perforation. The polymer layer includes voided regions that allow for relative movement of the two metal layers.</description><language>eng ; kor</language><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; TRANSPORTING</subject><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170419&DB=EPODOC&CC=KR&NR=20170042513A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25569,76552</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170419&DB=EPODOC&CC=KR&NR=20170042513A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BERGERON PHILLIP J</creatorcontrib><creatorcontrib>MOONEY JUSTINE A</creatorcontrib><creatorcontrib>GEISSINGER JOHN D</creatorcontrib><creatorcontrib>GUNDEL DOUGLAS B</creatorcontrib><creatorcontrib>PALANISWAMY RAVI</creatorcontrib><creatorcontrib>FOO SIANG SIN</creatorcontrib><creatorcontrib>LUNCEFORD BRENT D</creatorcontrib><title>MEMS MEMS DEVICES ON FLEXIBLE SUBSTRATE</title><description>하나 이상의 MEMS 요소를 포함하는 가요성 필름과 이러한 가요성 필름을 포함하는 물품이 기술된다. 가요성 필름은 2개의 금속 층들 사이에 중합체 층을 포함하며, 이때 금속 층들 중 하나는 천공을 포함한다. 중합체 층은 2개의 금속 층의 상대 운동을 가능하게 하는 공극형 영역들을 포함한다.
A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a polymer layer between two metal layers with one of the metal layers containing a perforation. The polymer layer includes voided regions that allow for relative movement of the two metal layers.</description><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2017</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFD3dfUNVgATLq5hns6uwQr-fgpuPq4Rnk4-rgrBoU7BIUGOIa48DKxpiTnFqbxQmptB2c01xNlDN7UgPz61uCAxOTUvtSTeO8jIwNDcwMDEyNTQ2NGYOFUAZMgkiA</recordid><startdate>20170419</startdate><enddate>20170419</enddate><creator>BERGERON PHILLIP J</creator><creator>MOONEY JUSTINE A</creator><creator>GEISSINGER JOHN D</creator><creator>GUNDEL DOUGLAS B</creator><creator>PALANISWAMY RAVI</creator><creator>FOO SIANG SIN</creator><creator>LUNCEFORD BRENT D</creator><scope>EVB</scope></search><sort><creationdate>20170419</creationdate><title>MEMS MEMS DEVICES ON FLEXIBLE SUBSTRATE</title><author>BERGERON PHILLIP J ; MOONEY JUSTINE A ; GEISSINGER JOHN D ; GUNDEL DOUGLAS B ; PALANISWAMY RAVI ; FOO SIANG SIN ; LUNCEFORD BRENT D</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20170042513A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2017</creationdate><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>BERGERON PHILLIP J</creatorcontrib><creatorcontrib>MOONEY JUSTINE A</creatorcontrib><creatorcontrib>GEISSINGER JOHN D</creatorcontrib><creatorcontrib>GUNDEL DOUGLAS B</creatorcontrib><creatorcontrib>PALANISWAMY RAVI</creatorcontrib><creatorcontrib>FOO SIANG SIN</creatorcontrib><creatorcontrib>LUNCEFORD BRENT D</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>BERGERON PHILLIP J</au><au>MOONEY JUSTINE A</au><au>GEISSINGER JOHN D</au><au>GUNDEL DOUGLAS B</au><au>PALANISWAMY RAVI</au><au>FOO SIANG SIN</au><au>LUNCEFORD BRENT D</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MEMS MEMS DEVICES ON FLEXIBLE SUBSTRATE</title><date>2017-04-19</date><risdate>2017</risdate><abstract>하나 이상의 MEMS 요소를 포함하는 가요성 필름과 이러한 가요성 필름을 포함하는 물품이 기술된다. 가요성 필름은 2개의 금속 층들 사이에 중합체 층을 포함하며, 이때 금속 층들 중 하나는 천공을 포함한다. 중합체 층은 2개의 금속 층의 상대 운동을 가능하게 하는 공극형 영역들을 포함한다.
A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a polymer layer between two metal layers with one of the metal layers containing a perforation. The polymer layer includes voided regions that allow for relative movement of the two metal layers.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING |
| title | MEMS MEMS DEVICES ON FLEXIBLE SUBSTRATE |
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