Spin head and apparatus for treating a substrate

The present invention relates to a spin head and a substrate treating apparatus. According to the present invention, the spin head comprises: a body; a base positioned inside the body; a motor rotating the base; a cam installed on the base and able to rotate; a chuck rod moving straightly in accorda...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NOH, HWAN IK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!