LONG LIFETIME THERMAL SPRAY COATING FOR ETCHING OR DEPOSITION CHAMBER APPLICATION

According to the present invention, provided are several inventions including a substrate processing device having multi-layer surfaces configured to face plasma and resist against corrosion. In one embodiment, the multi-layer surfaces can include a base layer of aluminum, anodized aluminum, or quar...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SCHAEFER DAVID M, LIU CHIN YI, ANDERSON NASH W, ORMOND RUSSELL
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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