SEMICONDUCTOR DEVICE HAVING SHALLOW TRENCH ISOLATION LINER

Provided is a semiconductor device. The semiconductor device includes: an STI trench defining an active area formed in a substrate; an STI liner formed in a conformal way along the bottom surface and a side wall of the STI trench; an element separation film formed on the STI liner, and embedding at...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIM, YOUNG DAL, LIM, SUN ME, CHO, HAG JU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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