APPARATUS FOR PUMPING AND CLEANING

The present invention relates to a washing apparatus for washing an object to be washed, and to an exhausting apparatus. To be more specifically, the present invention relates to the washing device for removing foreign materials such as powder attached to the object to be washed, and to an exhaustin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RYU, HONG RYEOL, YOON, BONG HYUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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