PROBLEMATIC EQUIPMENT DETERMINATION METHOD AND APPARATUS THEREOF USING DEFECT MAP OF THE FAULTY PRODUCTS SAMPLE

Provided are a method for determining whether any among equipment where faulty products of the entire faulty sample is problematic using a defect map of the entire faulty sample consisting of faulty products and an apparatus using the method. According to the present invention, the problematic equipment determination method comprises the steps of: generating a sample defect map indicating cell-specific defect distribution of the faulty sample that is a set of products, which is divided into a plurality of cells; generating an equipment defect map for at least one among equipment through which each product of the faulty sample passes, wherein the equipment defect map for specific equipment indicates cell-specific defect distribution of the products, which pass through the specific equipment, among the products of the faulty sample; calculating the map similarity between the sample defect map and the equipment defect map with respect to each equipment for which the equipment defect map is generated; and determining problematic equipment for the faulty sample based on the calculated map similarity for each equipment.