ELECTRO STATIC CHUCK HAVING EXCELLENT THERMAL SHOCK RESISTANCE AND METHOD FOR MANUFACTURING THE SAME

The present invention relates to an electro static chuck and a manufacturing method thereof and, more specifically, to an electro static chuck, which includes a parent metal made of Ni-Fe-Co alloy and a dielectric layer formed on one side of the parent metal and has excellent thermal shock resistanc...

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Bibliographische Detailangaben
Hauptverfasser:	KIM, SE JONG, LEE, KWANG SEOK, BYON, EUNG SUN, LEE, JUNG HWAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ALLOYS BASIC ELECTRIC ELEMENTS CHEMISTRY COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FERROUS OR NON-FERROUS ALLOYS GENERATION MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING TREATMENT OF ALLOYS OR NON-FERROUS METALS
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