SUBSTRATE TRANSFERRING APPARATUS

A substrate transferring apparatus supporting a substrate is disclosed. The substrate transferring apparatus according to the present invention has an arm composed of multiple pairs of Bernoulli grippers installed thereon to be inclined. Accordingly, the arrangement of flexible film type substrates...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	LEE, JAE MIN, JANG, HEE SUP
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A substrate transferring apparatus supporting a substrate is disclosed. The substrate transferring apparatus according to the present invention has an arm composed of multiple pairs of Bernoulli grippers installed thereon to be inclined. Accordingly, the arrangement of flexible film type substrates on the arm is relatively constant since only a part of the flexible film type substrates, on which the Bernoulli grippers are placed, is bent. Thus, the substrate transferring apparatus has an effect of conveniently loading or storing the flexible film type substrates in other places, wherein the flexible film type substrates are supported by the Bernoulli grippers without contact.