METHODS AND APPARATUS FOR CONTROLLING TEMPERATURE OF A MULTIZONE HEATER IN A PROCESS CHAMBER

Methods and apparatus for controlling the temperature of multi-zone heater in a process chamber are provided herein. In some embodiments, a method is provided to control a multi-zone heater disposed in a substrate support, wherein the multi-zone heater has a first zone and a second zone. In some emb...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AMBAL HARI KISHORE, HALLER UWE PAUL, ZHOU JIANHUA
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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