TEXTURING OF MONOCRYSTALLINE SEMICONDUCTOR SUBSTRATES TO REDUCE INCIDENT LIGHT REFLECTANCE

TEXTURING OF MONOCRYSTALLINE SEMICONDUCTOR SUBSTRATES TO REDUCE INCIDENT LIGHT REFLECTANCE

Because a monocrystalline semiconductor substrate is textured by using an alkali solution and a pyramid structure is formed on its surface, the reflectivity of incident light is reduced and the light absorption of a wafer is improved. An alkaline bath includes a composition for preventing an uneven...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: O'CONNOR COREY, HINKLEY PETER W, BARR ROBERT K, ALLARDYCE GEORGE R
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Because a monocrystalline semiconductor substrate is textured by using an alkali solution and a pyramid structure is formed on its surface, the reflectivity of incident light is reduced and the light absorption of a wafer is improved. An alkaline bath includes a composition for preventing an uneven region from being formed between the pyramid structures and improving the light absorption.