SEMICONDUCTOR MANUFACTURING APPARATUS HAVING VARIABLE TRANSFERRING PATHS AND IN-LINE SYSTEM HAVING THE SAME
The present invention relates to a semiconductor manufacturing apparatus having various transfer paths and an in-line system including the same. The semiconductor manufacturing apparatus includes: a vacuum processing space comprising one side port and the other side port on both sides which are faci...
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creator | BANG, JUNG MIN ANH, SUNG IL LEE, BYUNG WOO |
description | The present invention relates to a semiconductor manufacturing apparatus having various transfer paths and an in-line system including the same. The semiconductor manufacturing apparatus includes: a vacuum processing space comprising one side port and the other side port on both sides which are facing each other; a first transfer path transferring a first member to the other side port by being inserted from the one side port; a second transfer path delivering a second member and a fourth member to the one side port through a branch node by being inserted from the other side port; and a third transfer path delivering a third member along the direction having a fixed angle with the second transfer path from the branch node on the second transfer path. |
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language | eng ; kor |
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subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
title | SEMICONDUCTOR MANUFACTURING APPARATUS HAVING VARIABLE TRANSFERRING PATHS AND IN-LINE SYSTEM HAVING THE SAME |
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