METHOD FOR GENERATING HIGH QUALITY GeH_4 AND APPARATUS FOR GENERATING HIGH QUALITY GeH_4

The present invention relates to a high purity GeH4 generating method and a high purity GeH4 generating apparatus. The GeH4 generating method according to the present invention comprises: a synthesis step which produces a first aqueous solution by successively dissolving KOH of solid state, NaBH4 of...

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Bibliographische Detailangaben
Hauptverfasser: KIM, KIL SOO, JUNG, WOO CHAN, CHOI, HYEUNG CHUL, MOON, HUNG MAN
Format: Patent
Sprache:eng ; kor
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