AN APPARATUS FOR INSPECTING BLANK MASK
PURPOSE: Apparatus for inspecting a blank mask conducts an inspection about the existence of a pin hole before processing the blank mask. CONSTITUTION: Apparatus for inspecting a blank mask comprises a main body (110) in which an inspection stage (113) for mounting a blank mask (10) is installed; a...
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| creator | HAN, SEOK BIN JEON, SEUNG YONG |
| description | PURPOSE: Apparatus for inspecting a blank mask conducts an inspection about the existence of a pin hole before processing the blank mask. CONSTITUTION: Apparatus for inspecting a blank mask comprises a main body (110) in which an inspection stage (113) for mounting a blank mask (10) is installed; a lighting device (120) emitting light onto one side of the blank mask put on the examination stage; a camera (130) photographing the opposite side of the blank mask; a display part (140) displaying image photographed by the camera; and a controller controlling the lighting device, the camera, and the display part. |
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CONSTITUTION: Apparatus for inspecting a blank mask comprises a main body (110) in which an inspection stage (113) for mounting a blank mask (10) is installed; a lighting device (120) emitting light onto one side of the blank mask put on the examination stage; a camera (130) photographing the opposite side of the blank mask; a display part (140) displaying image photographed by the camera; and a controller controlling the lighting device, the camera, and the display part.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; kor |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES |
| title | AN APPARATUS FOR INSPECTING BLANK MASK |
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