TESTER OF PACKAGE FOR LEAK TESTER OF PIEZOELECTRIC ELEMENT PACKAGE

TESTER OF PACKAGE FOR LEAK TESTER OF PIEZOELECTRIC ELEMENT PACKAGE

PURPOSE: A testing apparatus of a leak testing package of a piezoelectric element package is provided to provide an impedance measuring structure of an aligned piezoelectric element package before and after pressurization. CONSTITUTION: A pair of first and second X-axis rails is horizontally arrange...

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Hauptverfasser: RYU, IN HWAN, LEE, HAK PYO, CHOI, JIN SEOK, YANG, IL CHAN
Format: Patent
Sprache:eng ; kor
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ELECTRICITY
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creator RYU, IN HWAN
LEE, HAK PYO
CHOI, JIN SEOK
YANG, IL CHAN
description PURPOSE: A testing apparatus of a leak testing package of a piezoelectric element package is provided to provide an impedance measuring structure of an aligned piezoelectric element package before and after pressurization. CONSTITUTION: A pair of first and second X-axis rails is horizontally arranged. A pair of shuttle pockets(30) processes different processes by being respectively arranged on the first and second X-axis rails. A bowl bushing(311) is formed under the shuttle pockets to be guided to an upper direction by a pressure unit(313). A pressure spring(32) for restoring an original position of the shuttle pockets is formed under the bowl bushing. The shuttle pockets are moved as a pressurized unit(31) following the first and second X-axis rails. A testing unit(40) performs a leak test of a work about one of the shuttle pockets.
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title TESTER OF PACKAGE FOR LEAK TESTER OF PIEZOELECTRIC ELEMENT PACKAGE
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