A METHOD FOR COATING HEAT-RESISTANCT GLASS FOR SEMICONDUCTOR PROCESS AND THE GLASS COATED BY THE SAME

PURPOSE: A method for coating heat-resistant glass for a semiconductor process and the heat-resistant glass coated by the same are provided to prevent the separation of a coating layer due to the difference of a thermal expansion coefficient by laminating complex oxide between the heat resistant gla...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MOON, HEUNG SOO, HAN, JIN WON, KWAK, CHAN WON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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