METHOD OF FORMING A MICROPATTERN

PURPOSE: A method of forming a micropattern is provided to improve LWR(Line Width Roughness) by forming a line-and-space pattern using a negative tone developer. CONSTITUTION: A photoresist(130) is spread on a substrate(110). The photoresist is exposed to outside by corresponding to the pattern of a...

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Bibliographische Detailangaben
Hauptverfasser:	KIM, JAE HO, YANG, JOO HYUNG, KIM, YOUNG HO, PARK, JEONG JU, KIM, KYOUNG MI, KIM, MIN JUNG, LEE, BO HEE
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE: A method of forming a micropattern is provided to improve LWR(Line Width Roughness) by forming a line-and-space pattern using a negative tone developer. CONSTITUTION: A photoresist(130) is spread on a substrate(110). The photoresist is exposed to outside by corresponding to the pattern of a line-and-space The non-exposure unit of the photoresist is removed using a negative tone developer to form the line-and-space pattern. The space of a spin-on-oxide material is formed in the side wall of the line-and-space pattern. The line-and-space pattern is removed by the developer.