A METHOD FOR CONTROLLING THE MOVEMENT OF AN APPARATUS, IN PARTICULAR A PLACE TOOL OF A DIE BONDER

A method for controlling the movement of an apparatus with N = 2 degrees of freedom x1,...,x N -1, z, is presented. The method comprises the steps of: determining an approximate target x-position xend app = (x1,end app,..., x N -1,end app); computing a first z-trajectory zup(t); computing an approxi...

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Bibliographische Detailangaben

Hauptverfasser:	STADELMANN TIM OLIVER, ERNST URBAN GEORG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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