SUPERJUNCTION STRUCTURES FOR POWER DEVICES AND METHODS OF MANUFACTURE

A power device includes an active region and a termination region surrounding the active region. A plurality of pillars of first and second conductivity type are alternately arranged in each of the active and termination regions. The pillars of first conductivity type in the active and termination r...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE, JAE GIL, SHENOY PRAVEEN MURALEEDHARAN, REXER CHRISTOPHER L, HIGGS JASON M, WANG QI, RINEHIMER MARK L, YUN, CHONG MAN, KIM, YONG SUB, KIM, CHANG WOOK, LEE, JONG HUN, LEE, JUNG KIL, YEDINAK JOSEPH A, JUNG, JIN YOUNG, JANG, HO CHEOL, SHARP JOELLE, REICHL DWAYNE S
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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