CONVEYING STRUCTURE OF GLASS SUBSTRATE FOR WET ETCHING APPARATUS

PURPOSE: A substrate transfer structure for a wet-etching apparatus is provided to transfer a large and slim substrate by supporting both sides of the substrate with a guide device. CONSTITUTION: A substrate transfer structure for a wet-etching apparatus includes a transfer body(100) and a power tra...

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Bibliographische Detailangaben

Hauptverfasser:	GANG, YEONG BIN, JUNG, KWANG BOK, JIN, BYEONG MUN, PARK, YONG KYU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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