CONVEYING STRUCTURE OF GLASS SUBSTRATE FOR WET ETCHING APPARATUS

PURPOSE: A substrate transfer structure for a wet-etching apparatus is provided to transfer a large and slim substrate by supporting both sides of the substrate with a guide device. CONSTITUTION: A substrate transfer structure for a wet-etching apparatus includes a transfer body(100) and a power tra...

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Bibliographische Detailangaben
Hauptverfasser:	GANG, YEONG BIN, JUNG, KWANG BOK, JIN, BYEONG MUN, PARK, YONG KYU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE: A substrate transfer structure for a wet-etching apparatus is provided to transfer a large and slim substrate by supporting both sides of the substrate with a guide device. CONSTITUTION: A substrate transfer structure for a wet-etching apparatus includes a transfer body(100) and a power transmission auxiliary device(200). A sprocket groove(130) is formed between the small end part(110) and the large end part(120) of the transfer body. The power transmission auxiliary device includes a fixing unit(210) and a power conversion unit(220). The power of the transfer body is converted to rotation power by the power conversion unit.