LOAD LOCK FAST PUMP VENT

LOAD LOCK FAST PUMP VENT

A substrate processing tool including a frame forming at least one isolatable chamber configured to hold a controlled atmosphere, at least two substrate supports located within each of the at least one isolatable chamber, each of the at least two substrate supports being stacked one above the other...

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Hauptverfasser: KRAUS JOSEPH A, CARBONE CRAIG J, BLAHNIK JEFFREY C, HALLISEY JOSEPH, ELLIOT MARTIN R, FONG HI YIN OWEN, HOFMEISTER CHRISTOPHER, KRUPYSHEV ALEXANDER, FOSNIGHT WILLIAM
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator KRAUS JOSEPH A
CARBONE CRAIG J
BLAHNIK JEFFREY C
HALLISEY JOSEPH
ELLIOT MARTIN R
FONG HI YIN OWEN
HOFMEISTER CHRISTOPHER
KRUPYSHEV ALEXANDER
FOSNIGHT WILLIAM
description A substrate processing tool including a frame forming at least one isolatable chamber configured to hold a controlled atmosphere, at least two substrate supports located within each of the at least one isolatable chamber, each of the at least two substrate supports being stacked one above the other and configured to hold a respective substrate and a cooling unit communicably coupled to the at least two substrate supports such that the at least two substrate supports and cooling unit effect simultaneous conductive cooling of each of the respective substrates located on the at least two substrate supports.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title LOAD LOCK FAST PUMP VENT
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