ELECTRON MICROSCOPE

An electron microscope is provided to prevent the distortion of data measured from detectors by positioning the detectors to the same position. The chamber(100) provides a vacuum space. A sample is loaded on the table formed in the vacuum space. The chamber has a chamber cover. A scanner(200) is con...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHUN, JUNG BUM, RYANG, DAL SOO, BANG, KUG HYEON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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