APPARATUS FOR REVERSING SUBSTRATE

APPARATUS FOR REVERSING SUBSTRATE

An apparatus for reversing a substrate is provided to remove interference between a substrate transfer robot and a holding unit, thereby making a process condition stable. An apparatus for reversing a substrate comprises a holding unit(100) and a reverse unit. The holding unit has the first gripper(...

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1. Verfasser: CHOI, CHUNG SIC
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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description An apparatus for reversing a substrate is provided to remove interference between a substrate transfer robot and a holding unit, thereby making a process condition stable. An apparatus for reversing a substrate comprises a holding unit(100) and a reverse unit. The holding unit has the first gripper(130), the second gripper(120), and a driving member and a support member(110). The first gripper is arranged in the direction of the reverse unit according to the rotation axis reversing the substrate. The second gripper is arranged in the opposite direction to the reverse unit. The first and second grippers hold the edge of the substrate. The driving member drives the first and second grippers. The driving member and the second gripper are connected by a bracket(122). The support member supports the substrate. The supporting member has a support ring(112) and a support pin(114). The support pins are arranged on the support ring. The bracket is arranged under the substrate located on the support member. The reverse unit inverts the holding unit.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title APPARATUS FOR REVERSING SUBSTRATE
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