MASTERING TOOLS AND SYSTEMS AND METHODS FOR FORMING A CELL ON THE MASTERING TOOLS

Mastering tools and systems and methods for forming a cell on the mastering tools are provided. An exemplary method includes emitting a first laser light pulse from a laser for a first predetermined time interval such that at least a portion of the first laser light pulse forms the cell on the maste...

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Bibliographische Detailangaben
Hauptverfasser: BASTAWROS ADEL F, KUMAR KARKALA ARUN, PETERS PHIL M, HAY GRANT
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Mastering tools and systems and methods for forming a cell on the mastering tools are provided. An exemplary method includes emitting a first laser light pulse from a laser for a first predetermined time interval such that at least a portion of the first laser light pulse forms the cell on the mastering tool. The cell has an opening size within a range of 10-100 micrometers and an aspect ratio less than or equal to 1.25.