METHOD FOR INSPECTING SEMICONDUCTOR DEVICE USING VISION, AND VISION INSPECTION SYSTEM FOR SEMICONDUCTOR DEVICE

A method and an apparatus for inspecting a semiconductor device using vision are provided to improve accuracy of the vision inspection by inspecting the semiconductor device through a visible ray and infrared rays twice. A vision inspecting method inspects the semiconductor device composed of a prin...

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Bibliographische Detailangaben
1. Verfasser: YANG, KEUN HWA
Format: Patent
Sprache:eng
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